Development of Dry-Vacuum-Pump for Semiconductor/Display Process
نویسندگان
چکیده
منابع مشابه
A Case Study of Autoregressive Modelling and Order Selection for a Dry Vacuum Pump
Oil-free dry-vacuum pumps are prevalent in semiconductor plants worldwide today. The popularity of such pumps has grown over the years but little research has been done in the area of condition-monitoring of dry-vacuum pumps. Fault detection of one such pump through the use of AutoRegressive (AR) modelling technique and spectral analysis of vibration and acoustic data has been studied. The test...
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ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2010
ISSN: 1225-8822
DOI: 10.5757/jkvs.2010.19.4.265